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Norm

ÖVE/ÖNORM EN 62047-21

Issue date: 2015 06 01

Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson`s ratio of thin film MEMS materials (IEC 62047-21:2014) (english version)

Valid
Publisher:
Austrian Standards International
Format:
Digital | 22 Pages
Language:
English
ICS
31.080.99 31.080.01 31.220.01
Topics
IT, communication & electronic, Electromechanical components for electronic and telecommunications equipment, Electromechanical components in general IT, communication & electronic, Electronic components, Other semiconductor devices IT, communication & electronic, Electronic components, Semiconductor devices in general Electric & lighting engineering, Electromechanical components for electronic and telecommunications equipment, Electromechanical components in general
ÖVE/ÖNORM EN 62047-21
2015 06 01
Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson`s ratio o...
Norm
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