STANDARD

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ÖVE/ÖNORM EN 62047-13

Issue date: 2012 11 01

Semiconductor devices - Micro-electromechanical devices - Part 13: Bend- and shear- type test methods of measuring adhesive strength for MEMS structures (IEC 62047-13:2012)

General information on ÖVE/ÖNORM EN 62047-13

Format
Digital | 17 Pages
Language
German | English
Publisher
Austrian Standards International

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ÖVE/ÖNORM EN 62047-13 - Semiconductor devices - Micro-electromechanical devices - Part 13: Bend- and shear- type test methods of measuring adhesive strength for MEMS structures (IEC 62047-13:2012)

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