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Norm

ÖVE/ÖNORM EN 62047-11

Issue date: 2014 06 01

Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems (IEC 62047-11:2013) (english version)

Valid
Publisher:
Austrian Standards International
Format:
Digital | 28 Pages
Language:
English
ICS
31.080.99 31.080.01 31.220.01
Topics
IT, communication & electronic, Electromechanical components for electronic and telecommunications equipment, Electromechanical components in general IT, communication & electronic, Electronic components, Other semiconductor devices IT, communication & electronic, Electronic components, Semiconductor devices in general Electric & lighting engineering, Electromechanical components for electronic and telecommunications equipment, Electromechanical components in general
ÖVE/ÖNORM EN 62047-11
2014 06 01
Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of l...
Norm
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