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Norm

OVE EN 62047-26

Issue date: 2017 01 01

Semiconductor devices - Micro-electromechanical devices -- Part 26: Description and measurement methods for micro trench and needle structures (IEC 62047-26:2016) (english version)

Valid
Publisher:
Österreichischer Verband für Elektrotechnik
Format:
Digital | 36 Pages
Language:
English
ICS
31.080.01 31.220.01
Topics
IT, communication & electronic, Electromechanical components for electronic and telecommunications equipment, Electromechanical components in general IT, communication & electronic, Electronic components, Semiconductor devices in general Electric & lighting engineering, Electromechanical components for electronic and telecommunications equipment, Electromechanical components in general
OVE EN 62047-26
2017 01 01
Semiconductor devices - Micro-electromechanical devices -- Part 26: Description and measurement met...
Norm
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