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Norm
OVE EN 62047-1
Issue date: 2017 01 01
Semiconductor devices - Micro-electromechanical devices -- Part 1: Terms and definitions (IEC 62047-1:2016) (german version)
In diesem Teil der IEC 62047 sind Begriffe für Bauelemente der Mikrosystemtechnik (MST) einschließlich der Fertigungsprozesse für solche Bauelemente festgelegt.
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Valid
Publisher:
Österreichischer Verband für Elektrotechnik
Format:
Digital | 38 Pages
Language:
German
Topics
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IT, communication & electronic, Electromechanical components for electronic and telecommunications equipment, Electromechanical components in general
IT, communication & electronic, Electronic components, Semiconductor devices in general
IT, communication & electronic, Electronic components, Electronics (Vocabularies)
Electric & lighting engineering, Electromechanical components for electronic and telecommunications equipment, Electromechanical components in general
Services & management, Information sciences. Publishing. Terminology, Electronics (Vocabularies)
In diesem Teil der IEC 62047 sind Begriffe für Bauelemente der Mikrosystemtechnik (MST) einschließlich der Fertigungsprozesse für solche Bauelemente festgelegt.
OVE EN 62047-1
2017 01 01
Semiconductor devices - Micro-electromechanical devices -- Part 1: Terms and definitions (IEC 62047...
Norm
↖
ÖVE/ÖNORM EN 62047-1
2006 11 01
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions (IEC 62047-1...
Norm