STANDARD

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ÖNORM EN ISO 23131

Issue date: 2023 02 15

Ellipsometry - Principles (ISO 23131:2021)

This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories. It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3.

General information on ÖNORM EN ISO 23131

Format
Digital | 22 Pages
Language
German | English | Download GER/ENG
Publisher
Austrian Standards International

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Normative References

Here you will find an extract of the normative references. Please refer to the document itself for the full list.

Dokumentnummer Titel Ausgabedatum Art Link
Dokumentnummer
ISO/IEC Guide 98-3:2008
Titel
Uncertainty of measurement — Part 3: Guide to the expression of uncertainty in measurement (GUM:1995) (Corrected version 2010-11)
Ausgabedatum
2008 09 30
Art
Technische Regel

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