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Norm
ÖNORM EN ISO 14644-15
Issue date: 2018 04 01
Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration (ISO 14644-15:2017)
This document provides requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms ...
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Valid
Publisher:
Austrian Standards International
Format:
Digital | 29 Pages
Language:
German
| English
| Download GER/ENG
Optionally co-design standards:
ICS
This document provides requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness classes by chemical concentration (see ISO 14644-8).
The following are outside the scope of this document:
— health and safety requirements;
— compatibility with cleaning agents and techniques;
— cleanability;
— biocontamination;
— specific requirements of equipment and materials for processes and products;
— design details of equipment.
ÖNORM EN ISO 14644-15
2018 04 01
Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of eq...
Norm
↖
Norm
ISO 14644-8:2013
Issue date :
2013 02 18
Cleanrooms and associated controlled environments — Part 8: Classification of air cleanliness by chemical concentration (ACC)