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Norm

ISO 16700:2004

Issue date: 2004 03 05

Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification

ISO 16700:2004 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. T...
Withdrawn: 2016 07 18
Publisher:
International Organization for Standardization
Format:
Digital | 16 Pages
Language:
English
Currently valid:

ISO 16700:2004 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. This International Standard does not apply to the dedicated critical dimension measurement SEM.

ISO 16700:2016
2016 07 18
Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification
Norm
ISO 16700:2004
2004 03 05
Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification
Norm
Norm
ISO 16700:2016
Issue date : 2016 07 18
Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification