STANDARD
ISO 16700:2016
Issue date: 2016 07 18
Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification
ISO 16700:2016 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. It does not apply to the dedicated critical dimension measurement SEM.
General information on ISO 16700:2016
Timeline
An overview of the development of ISO 16700:2016 from 2004 til today.
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ISO 16700:20162016 07 18 Standard ISO 16700:2016, Edition: 2016 07 18Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification
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ISO 16700:20042004 03 05 Standard ISO 16700:2004, Edition: 2004 03 05Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification
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