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Norm
ISO 13424:2013
Issue date: 2013 09 23
Surface chemical analysis — X-ray photoelectron spectroscopy — Reporting of results of thin-film analysis
ISO 13424:2013 specifies the minimum amount of information required in reports of analyses of thin films on a substrate by XPS. These analyses involve measurement of the ...
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Valid
Publisher:
International Organization for Standardization
Format:
Digital | 46 Pages
Language:
English
ICS
ISO 13424:2013 specifies the minimum amount of information required in reports of analyses of thin films on a substrate by XPS. These analyses involve measurement of the chemical composition and thickness of homogeneous thin films, and measurement of the chemical composition as a function of depth of inhomogeneous thin films by angle-resolved XPS, XPS sputter-depth profiling, peak-shape analysis, and variable photon energy XPS.
ISO 13424:2013
2013 09 23
Surface chemical analysis — X-ray photoelectron spectroscopy — Reporting of results of thin-film ana...
Norm
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