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Norm

IEC 60204-33:2009 Ed. 1.0

Issue date: 2009 12 10

Safety of machinery - Electrical equipment of machines - Part 33: Requirements for semiconductor fabrication equipment

IEC 60204-33:2009 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test ...
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Valid
Publisher:
International Electrotechnical Commission
Format:
Digital | 247 Pages
Language:
English
ICS
13.110 25.040.30 29.020
Topics
Mechanical & plant engineering, Industrial automation systems, Industrial robots. Manipulators Electric & lighting engineering, Electricity. Magnetism., Electrical engineering in general Electric & lighting engineering, Safety of machinery, Safety of machinery Safety, Safety of machinery, Safety of machinery
IEC 60204-33:2009 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors. It is applicable to the electrical equipment or parts of the electrical equipment that operate with nominal supply voltages not exceeding 1 000 V for alternating current (a.c.) and not exceeding 1 500 V for direct current (d.c.), and with nominal supply frequencies not exceeding 200 Hz. For higher voltages or frequencies, special requirements IEC 60204 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors.