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Norm
DIN EN 62047-1
Issue date: 2016 12
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions (IEC 62047-1:2016); German version EN 62047-1:2016(DIN EN 62047-1 (2006-10) remains valid alongside this standard until 2019-02-10.)
In diesem Teil der DIN EN 62047 sind Begriffe für Bauteile der Mikrosystemtechnik einschließlich deren Herstellung festgelegt.
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Valid
Publisher:
Deutsches Institut für Normung
Format:
Digital | 37 Pages
Language:
German
Topics
show all
IT, communication & electronic, Electromechanical components for electronic and telecommunications equipment, Electromechanical components in general
IT, communication & electronic, Electronic components, Semiconductor devices in general
IT, communication & electronic, Electronic components, Electronics (Vocabularies)
Electric & lighting engineering, Electromechanical components for electronic and telecommunications equipment, Electromechanical components in general
Services & management, Information sciences. Publishing. Terminology, Electronics (Vocabularies)
In diesem Teil der DIN EN 62047 sind Begriffe für Bauteile der Mikrosystemtechnik einschließlich deren Herstellung festgelegt.
DIN EN 62047-1
2016 12
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions (IEC 62047-1...
Norm
↖
DIN EN 62047-1
2006 10
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions (IEC 62047-1...
Norm