STANDARD

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ÖVE/ÖNORM EN 62047-21

Issue date: 2015 06 01

Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson`s ratio of thin film MEMS materials (IEC 62047-21:2014)

General information on ÖVE/ÖNORM EN 62047-21

Format
Paper | 18 Pages
Language
German | English
Publisher
Austrian Standards International

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ÖVE/ÖNORM EN 62047-21 - Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson`s ratio of thin film MEMS materials (IEC 62047-21:2014)

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