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Norm
ÖNORM EN ISO 14644-1
Issue date: 2016 05 15
Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness by particle concentration (ISO 14644-1:2015)
This part of ISO 14644 specifies the classification of air cleanliness in terms of concentration of airborne
particles in cleanrooms and clean zones; and separative devi...
Valid
Publisher:
Austrian Standards International
Format:
Digital | 52 Pages
Language:
German
| English
| Download GER/ENG
Optionally co-design standards:
ICS
This part of ISO 14644 specifies the classification of air cleanliness in terms of concentration of airborne
particles in cleanrooms and clean zones; and separative devices as defined in ISO 14644-7.
Only particle populations having cumulative distributions based on threshold (lower limit) particle
sizes ranging from 0,1 µm to 5 µm are considered for classification purposes.
The use of light scattering (discrete) airborne particle counters (LSAPC) is the basis for determination
of the concentration of airborne particles, equal to and greater than the specified sizes, at designated
sampling locations.
This part of ISO 14644 does not provide for classification of particle populations that are outside the
specified lower threshold particle-size range, 0,1 µm to 5 µm. Concentrations of ultrafine particles
(particles smaller than 0,1 µm) will be addressed in a separate standard to specify air cleanliness
by nano-scale particles. An M descriptor (see Annex C) may be used to quantify populations of
macroparticles (particles larger than 5 µm).
This part of ISO 14644 cannot be used to characterize the physical, chemical, radiological, viable or
other nature of airborne particles.
ÖNORM EN ISO 14644-1
2016 05 15
Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness by par...
Norm
↖
ÖNORM EN ISO 14644-1
1999 08 01
Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness (ISO 1...
Norm
Norm
Issue date :
2015 12 09
Cleanrooms and associated controlled environments — Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
Norm
Issue date :
2004 10 07
Cleanrooms and associated controlled environments — Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments)
Norm
Issue date :
2015 12 09
Cleanrooms and associated controlled environments — Part 1: Classification of air cleanliness by particle concentration