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Norm

ISO 16700:2016

Issue date: 2016 07 18

Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification

ISO 16700:2016 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. T...
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Valid
Publisher:
International Organization for Standardization
Format:
Digital | 18 Pages
Language:
English
ICS
37.020
Topics
IT, communication & electronic, Image technology, Optical equipment

ISO 16700:2016 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. It does not apply to the dedicated critical dimension measurement SEM.

ISO 16700:2016
2016 07 18
Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification
Norm
↖
ISO 16700:2004
2004 03 05
Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification
Norm