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Norm

ISO 11952:2014

Issue date: 2014 05 12

Surface chemical analysis — Scanning-probe microscopy — Determination of geometric quantities using SPM: Calibration of measuring systems

ISO 11952:2014 specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes for measuring geometric quantities at the highest level. I...
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Withdrawn : 2019 05 21
Publisher:
International Organization for Standardization
Format:
Digital | 58 Pages
Language:
English
Currently valid:

ISO 11952:2014 specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes for measuring geometric quantities at the highest level. It is applicable to those providing further calibrations and is not intended for general industry use, where a lower level of calibration might be required.

ISO 11952:2019
2019 05 21
Surface chemical analysis — Scanning-probe microscopy — Determination of geometric quantities using ...
Norm
ISO 11952:2014
2014 05 12
Surface chemical analysis — Scanning-probe microscopy — Determination of geometric quantities using ...
Norm
Norm
ISO 11952:2019
Issue date : 2019 05 21
Surface chemical analysis — Scanning-probe microscopy — Determination of geometric quantities using SPM: Calibration of measuring systems