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Norm

ISO 16700:2004

Ausgabedatum: 2004 03 05

Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification

ISO 16700:2004 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. T...
Weiterlesen
ZURÜCKGEZOGEN : 2016 07 18
Herausgeber:
International Organization for Standardization
Format:
Digital | 16 Seiten
Sprache:
Englisch
Aktuell Gültig:
ISO 16700:2016:2016 07 18
ICS
37.020
Fachgebiete
IT, communication & electronic, Image technology, Optical equipment

ISO 16700:2004 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. This International Standard does not apply to the dedicated critical dimension measurement SEM.

ISO 16700:2016
2016 07 18
Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification
Norm
ISO 16700:2004
2004 03 05
Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification
Norm
↖
Norm
ISO 16700:2016
Ausgabedatum : 2016 07 18
Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification