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Norm

ISO 14644-10:2013

Ausgabedatum: 2013 03 01

Cleanrooms and associated controlled environments — Part 10: Classification of surface cleanliness by chemical concentration

ISO 14644-10:2012 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including mol...
Weiterlesen
ZURÜCKGEZOGEN : 2022 05 04
Herausgeber:
International Organization for Standardization
Format:
Digital | 30 Seiten
Sprache:
Englisch

ISO 14644-10:2012 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). It is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices.

ISO 14644-10:2022
2022 05 04
Cleanrooms and associated controlled environments — Part 10: Assessment of surface cleanliness for c...
Norm
ISO 14644-10:2013
2013 03 01
Cleanrooms and associated controlled environments — Part 10: Classification of surface cleanliness b...
Norm
Norm
ISO 14644-10:2022
Ausgabedatum : 2022 05 04
Cleanrooms and associated controlled environments — Part 10: Assessment of surface cleanliness for chemical contamination