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Norm

ASTM E 1438

Ausgabedatum: 2011

Standard Guide for Measuring Widths of Interfaces in Sputter Depth Profiling Using SIMS

1.1 This guide provides the SIMS analyst with a method for determining the width of interfaces from SIMS sputtering data obtained from analyses of layered specimens. This...
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Herausgeber:
American Society for Testing and Materials
Format:
Digital | 3 Seiten
Sprache:
Englisch
Aktuell Gültig:
1.1 This guide provides the SIMS analyst with a method for determining the width of interfaces from SIMS sputtering data obtained from analyses of layered specimens. This guide does not apply to data obtained from analyses of specimens with thin markers or specimens without interfaces such as ion-implanted specimens. 1.2 This guide does not describe methods for the optimization of interface width or the optimization of depth resolution. This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
ASTM E 1438
2019 11 01
Standard Guide for Measuring Widths of Interfaces in Sputter Depth Profiling Using SIMS
Norm
ASTM E 1438
2011 11 01
Standard Guide for Measuring Widths of Interfaces in Sputter Depth Profiling Using SIMS
Norm
ASTM E 1438
2011
Standard Guide for Measuring Widths of Interfaces in Sputter Depth Profiling Using SIMS
Norm
ASTM E 1438
2006
Standard Guide for Measuring Widths of Interfaces in Sputter Depth Profiling Using SIMS
Norm
Historie aufklappen
Norm
ASTM E 1438
Ausgabedatum : 2011 11 01
Standard Guide for Measuring Widths of Interfaces in Sputter Depth Profiling Using SIMS